Magnetic Thin Films and Devices
Goals
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Magnetic thin film deposition lab. From left to right: Stephen Russek, Fred Mancoff, Bill Bailey, and Shehzaad Kaka.
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This project develops measurements and standards for magnetic thin-film materials
and devices for the magnetic-data-storage and magneto-electronics industries.
These measurements and standards assist industry in the development of advanced
magnetic recording systems, magnetic solid-state memory, magnetic sensors, and
magnetic microwave devices. The emphasis is on the performance of nanoscale devices,
consisting of multilayer and multicomponent thin-film systems, at microwave
frequencies. Project members have successfully devised better methods to measure
and control the dynamical properties of magnetic devices operating in the
gigahertz regime. They have fabricated magnetic nanostructures to measure
new spin-dependent transport phenomena and to determine the resolution of magnetic
imaging systems. In addition, the project is developing new combinatorial materials
techniques for magnetic thin films and new types of on-wafer magnetic metrology.
Long-term goals include the development of metrology that will be required to
develop quantum spin-based electronics for data storage and terahertz information processing.
Customer Needs
Our project serves the needs of U.S. industries that use and develop magnetic
thin-film and magnetic-device technologies. These industries include magnetic
hard-disk recording, magnetic tape recording, magnetic random-access memory (MRAM),
and magneto-electronics (including sensors, isolators, and microwave devices). The
data storage and magneto-electronics industries are pushing toward smaller and
faster technologies that require sub-micrometer magnetic structures to operate
in the gigahertz regime.
New techniques are required to measure and characterize these magnetic structures.
Advances in technology are dependent on the discovery and characterization of new
effects such as giant magnetoresistance and spin-dependent tunneling. A detailed
understanding of spin-dependent transport is required to optimize these effects and
to discover new phenomena that will lead to new device concepts.
Magnetic thin-film systems have become increasingly complicated, often containing
quaternary alloys or multilayer systems with 4 to 10 elements that require
atomic-level control of the layers. New techniques are required to efficiently and
systematically develop and characterize the magnetic, electronic, and mechanical
properties of these advanced thin-film systems. In particular, new metrological
systems are required that will be capable of making on-wafer measurements on a
large number of sites over a large region of parameter space.
Technical Strategy
We are developing several new techniques to address the needs of U.S. industries
that require characterization of magnetic thin films and device structures on
nanometer-size scales and gigahertz frequencies.
We have fabricated magnetic nanostructures that can be used to determine the
resolution and relative merits of various magnetic-imaging systems. These structures
include bits recorded on commercial media, small Co-Pt nanostructures fabricated by
electron-beam lithography, and small structures fabricated by focused-ion-beam
techniques. The magnetic structures must have stable, well characterized features on
length scales down to 10 nanometers to allow the testing of commercial imaging systems.
We have fabricated test structures that allow the characterization of small
magnetic devices at frequencies up to 10 gigahertz. The response of sub-micrometer
magnetic devices, such as spin-valves, magnetic tunnel junctions, and
giant-magnetoresistive devices with current perpendicular to the plane, have been
characterized both in the linear-response and the nonlinear switching regimes. The
linear-response regime is used for magnetic recording read sensors and high-speed
isolators, whereas the switching regime is used for writing or storing data.
Measured data have been compared to numerical simulations of the device dynamics
to determine the ability of current theory and modeling to predict the behavior
of magnetic devices.
We are developing new techniques to measure the high-frequency noise and effects of
thermal fluctuations in small magnetic structures. Under-standing the detailed
effects of thermal fluctua-tions will be critical in determining the funda-mental
limit to the size of magnetic sensors, magnetic data bits, and MRAM elements.
We are developing new techniques to measure the electronic and magnetic properties
of magnetic thin-film systems in situ (as they are deposited). One such technique,
in-situ magnetoconductance measurements, can determine the effects of surfaces and
interfaces on spin-dependent transport in a clear and unambiguous manner. The
effects of sub-monolayer additions of oxygen, noble metals, and rare earths on
giant magnetoresistance have been studied.
We are developing combinatorial materials techniques to assist industry in the
development and characterization of complicated magnetic thin-film systems.
Combinatorial materials techniques involve the fabrication of libraries of materials
with a systematic variation of materials properties, such as composition and
growth temperature. In addition to fabrication of libraries of materials, the
combinatorial process involves the development of high-throughput on-wafer
metrologies that can systematically characterize the libraries and scan for
desirable materials properties.
Finally, we are exploring new physical effects to create the foundation to develop
entirely new technologies relying on spin-dependent transport at the quantum level.
We are investigating the use of spin-momentum transfer to induce a dynamical
response for microwave and high-speed signal processing systems. We are
investigating methods of measuring small numbers of spins in semiconductor
devices and spin traps. Developing this metrology will be essential to the
development of methods to control and manipulate small numbers of spins in a
spin circuit.
Deliverables
In 2002, we will fabricate spin valves, 100 nanometers in size, and measure switching and precession induced by spin-momentum transfer.
During 2002, we will measure the high-frequency noise in submicrometer giant-magnetoresistive (GMR) devices to assess the fundamental size limits of GMR sensors.
In 2002, we will design and fabricate a spin trap using GaAs heterostructures and develop measurement techniques to determine spin prop-erties in small spin packets.
In 2003, we will develop a practical on-wafer system to measure magnetostriction.
In 2003, we will characterize the super-paramagnetic transition in a single magnetic nanoparticle.
Accomplishments

Micrograph of multi-layer, giant-magneto-resistive (GMR) perpendicular spin-valves, about 100 nanometers in size.
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Plot showing the switching of the magnetization due to the injection of a spin-polarized current.
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Rare-Earth Doping Used to Control High-Speed Dynamics of Magnetic Data Storage
Components - We have explored the use of rare-earth dopants to control the high-speed
dynamics in magnetic thin films used in magnetic recording heads and magnetic random
access memory (MRAM). We discovered that a small amount of Tb dopant in Ni-Fe films
can dramatically increase the magnetic damping without substantially changing the
other magnetic properties. The films can be engineered to be underdamped, critically
damped, or overdamped by varying the dopant concentration from 0 to 4 percent.
High-speed measurements were made at frequencies up to 6 gigahertz by means of a
pulsed inductive technique developed in the Magnetodynamics Project. Rare earths
have long been known to increase magnetic damping in ferrite materials used in
microwave devices. For microwave applications, damping is undesirable, and efforts
have concentrated on eliminating rare-earth impurities. However, for magnetic-data-storage
applications, critically damped behavior is desirable to prevent ringing and magnetic
turbulence when magnetic elements are rotated or switched. For instance, a typical
"spin-valve" read sensor, in response to a 250 picosecond pulsed field from a
magnetic bit, will ring for approximately 2 nanoseconds after the applied bit field.
Similarly, when an MRAM element is switched, the magnetic energy will cause the
element to oscillate or break up into a disordered high-temperature magnetic state.
The switching properties of the element will be dramatically altered until the
magnetic energy is removed from the system. This can lead to undesirable switching
in MRAM arrays if the clock speeds are faster than the magnetic cooling rate.
Further temperature-dependent measurements and characterization of films doped with
different rare earths indicate that the increased damping is due to local lattice
distortions at the rare earth sites due to anisotropic orbitals that are strongly
coupled to the film magnetization. The ability to engineer the high-speed dynamical
properties of magnetic systems will become critical in the next few years when both
magnetic recording and MRAM operation will be pushed into the gigahertz regime.
Precessional Switching in Magnetic Memory Devices Demonstrated - A particular
type of thin-film magnetic device called a "spin-valve" can be engineered to have
two stable states of electrical resistance based on the relative magnetization
orientation of its ferromagnetic layers. This property has motivated a strong
interest in using spin-valves as recording bits in non-volatile magnetic random
access memory (MRAM). Companies such as IBM, Motorola, and Honeywell are actively
developing MRAM.
A primary technical requirement is precise control of the switching of individual
devices. We have been studying the dynamics of magnetization reversal in spin-valves.
Devices have sub-micrometer dimensions and are fabricated within a test structure
that includes high-bandwidth transmission lines. One line delivers ultra-fast
magnetic field pulses to the device. The other line is electrically connected to
the device and carries the voltage pulse generated as the device changes state.
This voltage pulse serves as a probe of the magnetization dynamics of the device.
In a spin-valve, only one ferromagnetic layer, the "free layer," responds to
external fields. Internal magnetic fields within the device allow only two stable
magnetization directions, 180 degrees apart, along an easy axis. Current
implementation of MRAM requires field pulses applied for 10 to 20 nanoseconds along
either the positive or negative easy axis, depending on the desired state. We have
discovered a way to switch the devices using field pulses with durations of less
than 300 picoseconds directed perpendicular to the easy axis. The magnetization is
reversed due to large-angle precessional motion. For pulses of longer duration, the
device does not switch because the magnetization rotates back to its initial
direction while the pulse is on.

Plot of the magnetization response of a Ni80Fe20 film showing
underdamped behavior and of a 2 percent Tb-doped Ni80Fe20 film showing critical damping.
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Precessional switching requires only a single polarity pulse applied perpendicular
to the device easy axis, which results in a toggle operation of the magnetic state
of the device. This is a simpler and more efficient bit-setting operation than using
pulsed fields along the easy axis, which requires longer pulses in both directions.
Combinatorial Libraries: Phase Diagrams on a Chip - The first NIST magnetic
combinatorial thin-film libraries were fabricated and characterized in collaboration
with the NIST Materials Science and Engineering Laboratory (MSEL) and Veeco
Instruments. We fabricated Ni-Fe-Co-Tb compositional libraries and distributed them
to collaborators for measurements. The libraries, fabricated on 7.6 centimeter
wafers, contained 400 sites, each 2 millimeters on a side with a different elemental
composition. MSEL performed X-ray diffraction measurements to determine
microstructure, Veeco characterized the libraries with scanned magneto-optic Kerr
effect (MOKE) magnetometry, and we measured the magnetic properties using
alternating-gradient-field and superconducting-quantum-interference-device (SQUID)
magnetometers. Additional libraries were provided to MSEL to assist in the
development of on-wafer magnetostriction measurements. The libraries showed a
complex phase diagram with several different microstructural and magnetic regions
with dramatically different properties. The library contained regions of in-plane
magnetization, out-of-plane magnetization, isotropic magnetic properties, and
paramagnetic behavior.
The goals of this initial magnetic combinatorial program were to fabricate libraries
of technological interest with a complex phase diagram, challenge the existing
metrologies to determine whether they could efficiently and completely characterize
the libraries, determine what type of new metrologies will be needed for successful
application of combinatorial techniques to magnetic systems, and to create awareness
in the magnetic technology and metrology community of the potential and requirements
of magnetic combinatorial techniques. These goals have all been met and have set the
stage for a more comprehensive program to develop the methodology and metrology
required to implement combinatorial techniques to assist in the development of
advanced magnetic data storage and magnetoelectronic materials. Several
magnetic-data-storage companies are interested in this program and have expressed
the opinion that, due to the complexity of the magnetic materials being used, and
the need to develop and implement these complex materials quickly, systematic
materials development techniques will be essential.

(a) Switching probability of a 0.4 micrometer x 1.1 micrometer spin valve as a function of transverse field pulse width.
The decrease in switching probability as the pulse width increases is an indication of precessional switching. (b) The
trajectory of the magnetization: point A is the initial position; if the pulse is turned off between points B and C, the bit will switch.
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Effect of Surfaces and Interfaces on
Magnetoresistance - Using a recently developed in-situ magnetoconductance technique,
we completed an analysis of the effects of surfaces and interfaces on electron
scattering in spin-valve devices. The measurements demonstrated the ability to
precisely characterize changes in electron transport due to atomic-level changes
in surfaces and interfaces. The spin-valves were similar to those being developed
for magnetic-recording read heads, and consisted of multilayers of NiO/Ni-Fe/Co/Ru/Co/Cu/Co/X,
where the top layer X was varied to included noble metals, transition metals, and
oxides. The magnetoconductance was measured during deposition after every 0.25
monolayer of deposition. The variation of the conductance provides information on
the scattering and added conductance channels of each added monolayer, while the
magnetoconductance provides information on the spin-dependent scattering. It was
found that the increase in magnetoconductance, as the thickness of the free layer
was increased, could not be explained by simple semiclassical transport models that
predict that the saturation length should be equal to the elastic mean free path in
the free layer. Measurements of the effects of nano-oxide layers (NOL) further
revealed that the increase in magnetoresistance due to the NOL did not, as predicted
by simple transport models, scale with free-layer thickness. These models assume the
magnetoresistance change can be described semiclasically by a changing surface
specularity due to NOL formation. Our work has shown that more complete quantum-mechanical
models are required for quantitative description of electron transport. These
measurements provide a more accurate and precise characterization of spin-dependent
transport in giant magnetoresistance systems than was previously available. This
type of characterization is an essential first step in the development models that
can quantitatively describe and predict the performance of magnetic devices being
developed for magnetic-data-storage applications.
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